HO-SE-01 Variable Angle Spectroscopic Ellipsometer
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Variable Angle Spectroscopic Ellipsometer
Spectroscopic Ellipsometer is widely used for thin film analysis and measurements.
Holmarc’s spectroscopic ellipsometer incorporates Rotating Analyzer Ellipsometry technology to characterize thin film samples. It uses a high speed CCD array detection to collect the entire spectrum. It measures films from nanometer thickness up to tens of microns and the optical properties from transparent to absorbing materials. It accurately measures optical constants like refractive index, film thickness and extinction coefficient.
Our standard system comes with Quartz-Halogen lamp for visible through IR range. Our spectroscopic ellipsometer software allows the user to measure and analyze multilayer thin films and complex thin film structures.
An autocollimator, Z stage and tilt platforms are provided for sample alignment. XY motorized stage and motorized rotation stages are provided as unoptional feature for mapping thin film uniformity.
Specifications:
| Spectral range | 450 - 800 nm |
| Ellipsometer configuration | RAE |
| Detector | 3648 pixel CCD linear sensor |
| Spectral resolution | 1 nm |
| Incident angle | 50 - 75 degree (Resolution 0.1 degree, Automated operation) |
| Sample focusing | Automated |
| Sample thickness | 0.3 mm - 8 mm |
| Thickness measurement range | 20 nm - 10 microns |
| Resolution of film thickness | 0.01 nm |
| Resolution of measured R.I | 0.001 |
| Sample alignment | Manual tilt |
| Sample measurement | Automatic |
| Thickness analysis | Advanced mathematical fitting algorithms |
Features:
| Non-destructive and non-contact technique |
| Analysis of single and multilayer samples |
| Accurate measurements of ultra-thin films |
| Software for measurement, modeling and automatic operations |
| All range of (Ψ, Δ) can be measured |
| Uniform sensitivity for (Ψ, Δ) |
Software Features:
| Automatic operation |
| Automatic sample focusing |
| User extendable materials library |
| Data can be saved as Excel |
| Mathematical fitting algorithm |
| Multilayer thickness measurement |
| Deduction of thickness and optical constants |
Drawings:
Fig. Optical Layout of Variable Angle Spectroscopic Ellipsometer